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Hydrocarbon Sensor...


Analysis Type: Coupled Electrical / Thermal
Applications:    Thermal Design of Sensors and Electronic Components ...

Description:
The geometry consists of a membrane structure mounted on a silicon die. Two separate circuits are formed by platinum traces on the sensor. The outer circuit is the power generating circuit and the inner one serves as a temperature sensor with negligible amount of current flowing though it. The membrane consists of several layers totaling 2.6 microns. The silicon die is 400 micron thick and is 6 mm square. There are two 1.34 mm square regions interior to the die where the silicon is etched away leaving only the membrane.



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